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Hundreds of processes take place when making wafers into semiconductors. Among them, one of the most essential is etching. This process sees micro-patterns carved onto wafers by shaping circuits. For a successful etching process, it is important to manage the various variables within a set distribution and prepare each piece of equipment to operate in optimal condition. Our etch process engineers operate the manufacturing technology that handles this detailed work.

The SK hynix Newsroom team spoke with employees from the Icheon DRAM Front Etch, Middle Etch, and End Etch technology teams to learn more about their work.

Etching: Journey to Productivity Improvement

In semiconductor manufacturing, etching refers to engraving patterns on the film. The patterns are coated with plasma to make the final profile for each step of process. Its primary purpose is to accurately implement exact forms according to the layout, keeping results uniform and consistent under any conditions.

If a problem occurs during the deposition or photo processes, the problem area can be removed through selective etching. Alternatively, once something in the etching process goes wrong—it cannot be reversed. This is because it is impossible to refill the same material in the carved area. Therefore, etching is crucial in semiconductor manufacturing to determine the overall yield rate and product quality.

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The etching process is comprised of eight steps: ISO, BG, BLC, GBL, SNC, M0, SN, and MLM.

First, the silicon (Si) of the wafer is etched in the ISO (Isolation) stage and the active region of the cell is created. During the BG (Buried Gate) step, the word line¹ and gate are formed to make a channel for electrons. Next, connections between the ISO and bit line² are created in the cell region during the BLC (Bit Line Contact) process. The bit line of the cell is created simultaneously with the gate in peri³ during GBL (Peri Gate + Cell Bit Line) process.

In the SNC (Storage Node Contact) phase, work to build connections between the active region and the storage node⁴ proceeds. Later, the connection point of S/D (Source/Drain)⁵ in peri, and between the bit line and storage node, is formed in the M0 (Metal 0) step. The whole process is complete once the capacity of the cell is confirmed in the SN (Storage Node) stage and the external power and internal wiring are created during MLM (Multi-layer Metal) phase.

As etch technologists are responsible for patterning semiconductors, the department is divided into three teams: Front Etch (ISO, BG, BLC), Middle Etch (GBL, SNC, M0), and End Etch (SN, MLM). The teams are also divided into manufacturing and equipment roles.

The responsibility of manufacturing roles is to manage and improve the unit production process. Manufacturing roles are essential for increasing the yield rate and improving product quality through variable control and other production optimizations.

Whereas equipment roles manage and enhance production equipment to avoid errors during the etching process. The core responsibility of equipment roles is to ensure the best performance of machinery.

Although separated by responsibility, all teams have the same objective—managing and improving the production process and relevant equipment to enhance productivity. To achieve the goal, each team shares their results and points of improvement, collaborating for better business performance.

How to Solve the Challenges in Miniaturization

SK hynix began mass production of 1anm 8Gbit LPDDR4 DRAM using EUV equipment in July 2021

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Semiconductor memory’s circuit patterns have reached a level of 1anm and have been refined to accommodate approximately 10,000 cells in a single DRAM. As a result, the process margin proves insufficient even in the etching process.

When the hole⁶ is formed too small, a “not open” status can occur which blocks the lower portion of the chip. Alternatively, “bridge” phenomenon can become a problem when the hole is too large. “Bridge” phenomenon occurs when the gap between two holes is insufficient, and thus, they stick to each other in subsequent steps. As semiconductors become finer, the possible values of holes able to avoid these risks narrows gradually.

To solve this problem, etch technologists are continuing to make improvements including modifying the process recipe and APC⁷ algorithms as well as introducing new etch technologies like ADCC⁸ and LSR⁹.

Another challenge emerging, as customer needs become more diverse, is the trend of multi-product production. To meet such requirements, optimized process conditions for each product should be set separately. This presents a unique challenge as engineers must secure mass production technology that satisfies both prepared conditions and diverse ones.

For this, etch engineers introduced an “APC offset” ¹⁰ technique to manage various derivatives based on the core product, while building and utilizing a “T-index System” to manage products in an integrated way. These efforts are improving the system to suit multi-product production.

Let’s hear from our Etch Process Engineers.

What skills are required to complete the work done by your team?

Hana Kim, Technical Leader (TL)

I’m in charge of evaluating the work to improve dispersion as well as increase yield and productivity based on measured data by production engineers. Since etching is carried out with a hard-mask¹¹ made through various linkage processes, meticulous and accurate analysis is required. The final pattern must be determined in the etching process, therefore it is important to respond quickly when changes occur in linkage processes. Accurate analysis of data related to the overall understanding of semiconductor production is key to forming a complete pattern.

Taehee Yoo, Technical Leader (TL)

As an equipment engineer, I’m in charge of the maintenance, repair, set-up, and removal of equipment. The most important job of an equipment engineer is maintaining equipment so production can proceed under optimal conditions. It would be nice if machines always operated consistently, but their condition changes from time to time based on numerous variables. Therefore, it is necessary to have a broad perspective and to be able to assess problems from multiple angles.

How do you continue to develop your expertise?

Minho Kim, Technical Leader (TL)

Being familiar with the latest technologies is important—but these days, so is data utilization. It’s necessary to find correlations between data points like equipment data generated during production and response data that appears as a result. So, I’m studying statistical theories to use in analysis.

Louis Lee, Technical Leader (TL)

Considering the nature of technical manufacturing work, stable production is considered a job well done. So, I check everything carefully. Since process technology and equipment technology are mutually compatible, you need to understand the production process but also have an overall knowledge of the equipment. Therefore, I keep studying equipment-related content during my spare time. Our team offers opportunities to rotate between process and equipment roles to help members increase their knowledge of both disciplines.

What do you find rewarding about your work?

Hana Kim, Technical Leader (TL)

It is rewarding when the yield rate is enhanced through changes in production conditions. Although I’m proud that etching is a core step which directly connects to yield rate, I sometimes feel pressured by the thought that even small mistakes can be critical to the yield. I guess that’s why it feels rewarding to safely hand over a quality wafer to the next step in production.

Louis Lee, Technical Leader (TL)

The etching process is sometimes referred to as the pinnacle of semiconductor production, as it often determines the yield rate. Therefore, I find solving each and every task rewarding. That is the charm of this work, feeling rewarded when I break through difficulties and solve problems. I also feel the same amount of pride when I positively influence other coworkers by sharing an improvement to the process.

How about the overall work atmosphere in your team and group?

Taehee Yoo, Technical Leader (TL)

We are all proud to be on this team as etching is complicated and accounts for a large part of the entire semiconductor manufacturing process. Everyone is dedicated to their work which creates a dynamic and lively atmosphere. This sort of positive workplace stems from the fact that our team values enjoying our personal time too—so naturally our work-life balance is great.

Minho Kim, Technical Leader (TL)

We have a horizontal company culture, so everyone can actively express their opinions. Of course, when it comes to the work, it’s intense, but our team atmosphere is all about caring and having respect for each other. The FAB operates 24/7, so the scope of work we’re responsible for is broad. This means sometimes our work-life balance can take a back seat, but because we genuinely respect each other and communicate well as a team, people go the extra mile to help each other keep a good balance.

¹Word Line: a line, connected to the source portion of a transistor, responsible for reading and writing.
²Bit Line: a line passing though the transistor gate. When a voltage above a certain level is applied to the line, the transistor is turned on and is ready to read or write data.
³Peri: a peripheral circuit that controls cell operation.
⁴Storage Node: the sector managing data storage in DRAM, especially the lower electrode of the dielectric for data storage
⁵S/D (Source/Drain): source to emit electrons and drain to receive electrons.
⁶Hole: the level of empty electrons generated by the movement of electrons in a valence band.
⁷Advanced Process Control: a program that automatically adjusts variables per production according to a set calculation.
⁸ADCC (Active DC Control): a function to control the interrelationship determined by the RF Time through varying DC controller.
⁹LSR (Lam Spectral Reflectometer): a method to adjust the etching amount by calculating and estimating etching depth based on the reflection angle of light shot at the center of wafer.
¹⁰APC Offset: an automatic program to follow variables with a certain standard based on response performance for each product focusing on a certain product (usually a core product).
¹¹Hard-mask: a material with high etching selectivity used before depositing photoresist as it is hard to exclusively etch the lower part with insufficient margin provided by photoresist alone.

The post Details, Defined: A Look at Etch Technology first appeared on SK hynix Newsroom.

As a forward-looking company, we are always growing and looking to the potential of tomorrow, and the day after that. This applies to our vision for social value as well. To guide our trajectory over the next decade, SK hynix has announced SV 2030, a roadmap for maximizing social values across the company. Organized across four core areas of Environment, Shared Growth, Social Safety Net, and Corporate Culture, the ambitious project will aim to meet specific goals in each sector by 2030.

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A newly established Environmental, Social, Governance (ESG) Management Committee will convene on a quarterly basis to oversee the progression of our SV 2030 goals. This progress will be reported yearly in our annual sustainability management reports.

In his 2021 New Year’s speech, SK Chairman Chey Tae-Won emphasized the importance of this moment for the company: “It is a time when we need a new entrepreneurial spirit to empathize with society and work together to solve problems.”

Environment – Green 2030

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Environmental issues are a global concern – they affect us all, the planet we live on, and the air that we breathe. That’s why we care about the way in which our products are made, manufactured and treated. No matter the importance of a certain product, we believe its economic value must equal its social value.

Through Green 2030, SK hynix will join companies like Apple in achieving the RE100 benchmark by 2050, and thrive to achieving net zero (by 2050), zero additional emissions of air pollutants, a gold rating at ZWTL at its domestic production sites. Also, by advancing an eco-friendly semiconductor manufacturing system and increasing water reuse up to 3 times, we aim to contribute to a healthy planet that will continue to support future generations for years to come.

Shared growth – Advance Together

When our company succeeds, we all succeed. SK hynix aims to increase the competitiveness of the Korean semiconductor industry by enhancing the capabilities of our partner companies including suppliers of semiconductor materials, components, and equipment. As semiconductors have a profound impact on the national economy, we believe that revitalizing the semiconductor ecosystem through partnerships can reinvigorate our economy.

To this end, we will achieve KRW 3 trillion in cumulative investment in technological cooperation for business partners. We will sequentially invest KRW 1.2 trillion in the establishment and operation of a ‘We Do Tech Center,’ operated as SK hynix’s flagship semiconductor ecosystem platform. In addition, it will expand and implement a win-win growth program, including support for technologically innovative companies, industry-academia, and national projects.

Social Safety Net

A social safety net is an infrastructure to establish the role of companies in preparation for crisis situations such as pandemics or natural disasters, and to enhance their capabilities to solve social problems. We plan to create a system of roles that companies should perform in emergency situations and create a separate fund to implement them. We will also invest in the specific needs of the local communities where our production bases are located.

Building a healthy social safety net is no mean feat, but SK hynix has managed to do just that thanks to its tireless work for local communities made possible by its kindhearted employees. Our main goal is supporting those who need it the most, like low-income families and the elderly. This is why SK hynix America founded the VOICE (Valuable Opportunities for Interaction, Collaboration, and Engagement) initiative which allows its employees to do their bit for the local society through food bank volunteering, toy and backpack drives, fundraisers, and events supporting important social movements and celebrations like International Women’s Day. To assist elderly locals, the company set up a social contribution program that already benefits 100,000 people who are not familiar with modern technologies like using unmanned convenience stores.

SK hynix is helping communities in numerous ways. Take its job creation track record as a perfect example, is aiming to create 1,000 jobs for people with disabilities and encouraged more than 100,000 to participate in a its global ICT human resource development program. And SK hynix did not shy away when the pandemic struck the globe in early 2020, its US division donating an incredible 50,000 masks to medical workers around San Jose, California, where its HQ is based.

In the future, SK hynix plans to create a system of roles that companies should perform in emergencies and create a separate fund for this.

As we have seen through the COVID-19 pandemic, crises such as these tend to impact the weakest places in society. That’s why SK hynix plans to actively support the vulnerable against the threat of public safety, health and livelihood.

Corporate Culture – Diversity and Inclusion

SK hynix’s working culture continuously evolves, the company focusing on improving the happiness of its employees by providing a level playing field for all and the opportunity to grow as people and professionals. To foster an effective learning environment, we encourage employees with 200 hours of self-development education on top of insightful diversity training that promotes equal opportunities. The company is also making efforts to establish gender-balanced workforce, with a commitment to guarantee leadership-nutruring training programs for female employees twice the number of current female managers.

At SK hynix, the purpose of corporate management is to ensure the happiness of its members. We are committed to promoting a diverse and inclusive corporate culture where self-development is encouraged and supported.

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Our goal is to create a truly inclusive, vibrant community where all voices are lifted up and celebrated. To achieve this, we will implement education trainings on diversity and inclusion topics, expand our female recruitment rates, and reinforce our female leader training programs.

Your Questions Answered

Curious to hear even more? We’ve answered some of the top questions about our SV 2030 commitment below.

Q: What are we doing to become Net Zero by 2050?
A: A total of 13 million tons CO2 will be saved by 2030. Specifically, 6.5 million tons of CO2 emissions will be reduced  through domestic RE certification using green tariff plans and PPA, RE100 for Chinese business sites, and participation in carbon reduction projects in developing countries. Another 6.5 million tons will be saved by promoting CO2 reduction by supplying low-power semiconductors (detailed measurement methodology being developed).

Q: What are the air pollutants we’re concerned with? How much are we emitting?
A: Sulfur oxide, nitrogen oxide, dust, fluorine, ammonia, hydrogen chloride, formaldehyde (VOCs), etc. According to our Sustainability Reports, we emitted about 690 tons in 2020 and about 650 tons in 2019.

Q: What are we doing to expand waste recycling?
A: Enhancement of the actual recycling rate of designated wastes, promotion of heat recovery and reuse of incineration waste, reinforcement of waste resource recycling efforts, etc.

Q: What are some of the representative water resource saving activities?
A: There is a case of a water-free scrubber that breaks the common sense of conventional scrubbers that purify harmful gases with water and treats high-temperature gas with an indirect cooling method to save water and costs with a waterless scrubber.

Q: Is the ESG Management Committee a regular meeting body led by the CEO?
A: As the recent emphasis on ESG management continues, it is a new meeting body led directly by the CEO, and mid- to long-term ESG-related policies and strategic decisions are made.

Q: What is the status of RE100 declaration in the semiconductor industry?
A: In July 2020, Taiwan’s TSMC declared that it would achieve RE100 by 2050. SK hynix is the first among semiconductor memory companies to do so.

Q: Are there any plans for cooperation with partner companies as well as customers in the future related to RE100?
A: Many global clients have already declared and implemented RE100 and are requesting cooperation from our company in the supply chain to achieve their environmental goals. In the future, we will continue to maintain cooperation from the viewpoint of social value, and we will support environmental management of business partners through the ECO Alliance, etc.

The post SK hynix Announces SV 2030: A Long-Term Vision for Social Value first appeared on SK hynix Newsroom.

We believe that our internal efforts encourage employees to produce great results externally, and so we make it a priority to invest in our people.

These efforts take many shapes, but our “Learning Organization Series” is a particular point of pride for members of SK hynix America at every level. Led by the very talented people from within our company, these are monthly conversations on topics ranging from DRAM technology innovations and artificial intelligence to stocks and even wine. Diverse dialogues, these sessions create a space where employees can grow beyond their areas of immediate focus. They offer the opportunity for colleagues to learn from other colleagues and engage with them in new, enriching ways.

SK hynix 2019 Learning Organization Series

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One poignant session from recent memory was led by a VP of International Trade and Regulatory Affairs back in July. Rather than discussing the trade issues and regulatory matters that he routinely discusses during the workday, he chose to guide coworkers through a special hobby of his – wine. Leading the group through an advanced wine class, he covered everything from the grape to the wineries, from pinot noir to sauvignon blanc.

“It was really nice to get the perspective of a wine connoisseur on the origins of the types of wine. To be able to understand the pairing and the varieties of taste of wine was exceptional,” explained Larry Huynh, HR Team, who attended the Wine Learning Session. “On a bonus, it was a really great incentive to have a trivia to win the prizes!”

Steve Son sharing his expert knowledge in wine

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SK hynix America members taking the session of “Expanding the boundaries of AI revolution”

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Another session from May led by a senior manager of DRAM technical marketing explored the expanding boundaries of the AI revolution. And in June, a member of our sales team guided the audience through the delicate art of business communication.

We call this “knowledge sharing,” and it doesn’t stop at these monthly sessions. We feel that a culture of knowledge-sharing is one that promotes the kind of collaboration, curiosity, and enthusiasm that we seek to build into every aspect of our work. It’s a cross-pollination of ideas between each of our business sectors and beyond. From sales, to engineering, to regulatory affairs, each of our employees has something to share, and more importantly, something to learn.

“I love attending learning sessions. They are eye-opening and extremely informative for me as a sales professional,” shared Ty Chatchaidech, Sales Lead Team. They help me achieve better understanding of the whole ecosystem.”

SK hynix believes that a shared set of social values and a strong sense of community in the workplace allows employees to feel comfortable and empowered, and by extension, propels the company forward. Our customers see this in the quality of our products, in the depth of our ideas, and in the creativity of our concepts.

At the end of the day, we are confident that this emphasis on growth and learning in the workplace plays a vital role in the technological innovation that we pursue in the world.

The post Encouraging Innovation through Corporate Culture first appeared on SK hynix Newsroom.