¹Net Zero: The objective of reducing greenhouse gas emissions to a level where the amount of emissions is equal to the amount of those absorbed and removed, resulting in a state where the actual greenhouse gas emissions are zero.

Comprised of 12 specialized subcommittees, the CMC drives greenhouse gas (GHG) reduction efforts to cut emissions for each scope². The committee has already achieved significant milestones as it works toward its net zero goal, including the development of neon gas recycling technology, alternative gases, and high-efficiency, low-power scrubbers.

²Scope: Greenhouse gas emissions are categorized into Scope 1 (direct emissions), Scope 2 (indirect emissions), and Scope 3 (all other indirect emissions).

This article will focus on a project by the CMC’s Low-Power Pump Introduction subcommittee to develop low-power vacuum pumps and improve existing models, marking another step toward reaching net zero by 2050.

(From left) Members of the CMC’s Low-Power Pump Introduction subcommittee: Jungbin Lee (Technical Leader [TL] of Components Standardization), Seho Lee (TL of ThinFilm Technology Strategy), Haeyong Sung (Team lead of Components Standardization), Jinsik Yoo (TL of Components Standardization), and Seungwon Choi (TL of Components Standardization)

Low-Power Pumps: Advancing Semiconductor Miniaturization & GHG Reduction

Pumps play a vital role in determining the quality and yield of semiconductors by creating high-vacuum environments and eliminating impurities in increasingly miniaturized semiconductor processes. They account for approximately 15% of the total electricity usage of a fabrication plant (fab). The project therefore aimed to minimize the electricity consumption of pumps by introducing new low-power pumps and enhancing the energy efficiency of existing models, ultimately reducing Scope 2³ emissions.

³Scope 2: Indirect GHG emissions associated with the purchase and use of electricity, steam, heat, or cooling.

By implementing changes to motors, materials, structures, and introducing a new architecture, the team successfully developed low-power pumps to be deployed across existing and newly constructed SK hynix fabs. Efforts to reduce the capacity of existing pumps, such as lowering their revolutions per minute (RPM)⁴, have further cut power consumption. These upgrades will be applied to processes such as etching⁵ in existing fabs.

⁴Revolutions per minute (RPM): A measure of the speed at which a pump’s motor rotates, specifically the number of rotations around a fixed axis in one minute. Lowering the RPM reduces power consumption while maintaining the necessary operational performance.
⁵Etching: A process in semiconductor manufacturing where materials are removed from a wafer’s surface using chemicals or plasma to create precise patterns for circuits.

To learn more details about this remarkable achievement, the SK hynix Newsroom spoke with three members of the Low-Power Pump Introduction subcommittee: Jinsik Yoo and Jungbin Lee of Components Standardization and Seho Lee of Thin Film Technology Strategy.

(From left) Seho Lee, Jinsik Yoo, and Jungbin Lee discuss their project to develop low-power pumps

A Leap Forward: New Pumps Consume Nearly 40% Less Power Than Predecessors

In the first quarter of 2024, SK hynix began evaluating the newly developed low-power pumps for potential adoption. By the third quarter of the same year, the company started introducing these pumps in existing fabs through strategic investments. For the M15X fab and the Yongin Semiconductor Cluster, which are both currently under construction, the company plans to fully apply these new pumps only to processes that have been thoroughly evaluated. SK hynix also intends to expand the adoption of these low-power pumps to additional processes in the future.

During the initial evaluation phase in the first quarter of 2024, the team found that reducing the pump capacity in etching processes from 30,000 liters to 20,000 liters did not significantly impact semiconductor quality or yield. As a result, new investments in etching processes since the third quarter of 2024 have involved reducing pump capacity, in addition to incorporating low-power pumps, to maximize energy efficiency.

“By introducing the low-power pumps and reducing pump capacity, we have significantly cut power consumption. This is expected to not only lower carbon emissions but also contribute to savings in investments, repairs, and operating costs,” Jinsik Yoo explained.

Based on the main process standards of the existing M14 fab, it is estimated that using the low-power pumps rather than conventional models in the fabs currently under construction could decrease pump power consumption by 39.7%. This reduction in power consumption will substantially cut carbon emissions from electricity generation to help lower Scope 2 emissions.

The new low-power pumps consume significantly less power than their predecessors

Optimizing Existing Pumps: Cutting Power Consumption Through RPM Adjustment

In addition to developing low-power pumps, the project also focused on reducing the power consumption of existing pumps. “We could not feasibly replace every pump,” Jungbin Lee noted. “Therefore, the most effective path forward was to minimize the energy usage of our existing pumps, leading to many discussions to find the optimal solution.”

Following extensive talks, the Low-Power Pump Introduction subcommittee proposed reducing power consumption by lowering the RPM of existing pumps. To ensure this method would not affect ongoing processes, they conducted thorough Proof of Concept (PoC) verification, which included theoretical analysis, simulations, and on-site evaluations.

The verification process proved to be particularly challenging due to the variety of pump models from different manufacturers. Collaborating closely with field engineers, the team tested each pump individually to analyze yields and potential consequences of the RPM reduction.

After completing rigorous theoretical analysis and simulation modeling, the subcommittee piloted RPM reductions in select pumps used for the etching process and confirmed the change had no significant impact on the process yield. Encouraged by the pilot’s success, the team expanded evaluations at the M15 and M16 fabs.

“Once the process evaluations are complete and the RPM reductions are applied across the entire etching process at the M15 and M16 fabs, we expect to reduce average pump power consumption by 16.7%,” said Jinsik Yoo. “This improvement will cut electricity costs and help to reduce carbon emissions.”

By lowering pump RPM, the CMC expects to achieve key power savings

Shared Values & Collaboration: Key to the Successful Development of Low-Power Pumps

One key factor in the project’s success was the subcommittee’s strong collaboration with five pump partner companies and field engineers. “Thanks to this cooperation, where everyone shared the company’s goal of achieving net zero by 2050, we were able to develop and validate the new low-power pumps in a timely manner,” noted Seho Lee.

“Developing these innovative pumps presented significant challenges as there was limited data in this emerging field,” Jinsik Yoo added. “However, the proactive spirit of our partners, including their willingness to directly coordinate with their overseas headquarters, ensured the smooth and successful execution of the project.”

Field engineers also played a crucial role in the project’s success. Jungbin Lee said: “Engineers balanced their regular duties while taking on this project’s tasks such as analyzing equipment conditions and verifying test materials. Despite the challenges, their commitment to reaching the company’s 2050 net zero goal drove us to achieve the results we see today.”

The Low-Power Pump Introduction subcommittee actively supported various aspects of the project to ensure the seamless integration of new pumps into production. In particular, the subcommittee proactively assisted the process by estimating the additional costs expected from the introduction of the new pumps and preparing expenses and investment support in advance.

(From left) Seho Lee, Jinsik Yoo, and Jungbin Lee are determined to complete the pump project and achieve net zero by 2050

Reflecting on this collaborative triumph, Seho Lee said: “This project goes beyond sustainable management. It aims to protect the climate of our one and only planet, so I took a more active approach. This project made me realize that our pump partner companies and field engineers are united by shared values.”

Looking ahead, Jungbin Lee expressed his commitment to successfully completing the ongoing project and continuing the work to achieve net zero by 2050. “Building on the success of this project, we will also be leveraging AI technology in the future to optimize low-power pump management,” he said. “By selecting the optimal pump models and deploying them in the most effective locations, we aim to further reduce energy consumption and move closer to achieving our 2050 net zero goal.”

The post A Step Closer to Net Zero: SK hynix Adopts Low-Power Pumps to Cut Carbon Emissions first appeared on SK hynix Newsroom.

In February 2024, SK hynix became the first semiconductor company to unveil a mid- to long-term roadmap for bolstering the use of recycled materials. Through the roadmap, the company aims to raise the percentage of recycled materials used in its products to 25% by 2025 and to above 30% by 2030. The development of the neon recycling technology is expected to be a significant achievement for the company’s Material Recycling department in line with this roadmap.  

Figure 1. The process for recycling neon gas

Neon is one of the rare gases¹ and a key component of excimer laser gases², which are essential in the semiconductor lithography process³. As neon does not chemically decompose or transform when used as a laser light source, it can be recycled and reused through separation and purification processes. 

Taking advantage of this characteristic, SK hynix and TEMC succeeded in developing neon recycling technology. For the recycling process, a scrubber⁴ is used to capture the neon gas which is then collected in a tank following lithography. The neon gas is then selectively separated and purified using TEMC’s gas treatment process before being supplied to SK hynix for reuse in semiconductor manufacturing. Currently, the neon recovery rate, which is measured by multiplying emissions, capture volume, and purification yield, is at 72.7%. SK hynix plans to increase this rate to 77% by continuously improving the purification yield.

¹Rare gas: Gases including helium, neon, argon, krypton, xenon, and radon that exist in low concentrations in the atmosphere. Largely used in industrial processes, they are difficult to mass produce and impossible to synthesize artificially.
²Excimer laser gases: A mixture of noble, halogen and buffer gases used for an excimer laser, a type of ultraviolet laser used in lithography.
³Lithography: The process of creating patterns onto a substrate, typically silicon wafers, with a laser to define the layout of electronic components.
⁴Scrubber: Equipment that filters and treats waste gases generated during the semiconductor manufacturing process.

One-Team Collaboration with Partners Expected to Cut Neon Purchasing Costs

Figure 2. SK hynix collaborated with materials and equipment partners to recycle neon gas

SK hynix was able to develop this technology as a result of close cooperation and synergy with its materials and equipment partners which boast expertise in their respective fields. The company plans to develop more of these partnerships with industry specialists in the future.   

The application of the recycling technology offers significant benefits. When used in semiconductor fabs, the neon recycling technology is expected to cut the cost of purchasing neon by KRW 40 billion (USD 30 million⁵) per year⁶. 

⁵Based on the KRW-USD exchange rate in March 2024.
⁶This figure is based on the unit cost of neon in 2022 and expected volume that will be used in one fab of the Yongin Semiconductor Cluster.

The First Step to Developing 10 Raw Material Recycling Technologies by 2025

Figure 3. (From left to right) Hwanuk Song, Buseup Song, and Youngjun Jeong of the Material Recycling department discuss recycling innovations

The Material Recycling department led the development of the neon recycling technology. As a subcommittee of the Carbon Management Committee⁷, it is responsible for securing recycling technologies for non-chemically modified materials and establishing a recycling-friendly fab environment based on these innovations. The subcommittee aims to recycle all materials that are not chemically decomposed and transformed during the semiconductor process. By 2025, it plans to develop recycling technologies for a total of ten raw materials, including neon, deuterium, hydrogen, and helium gases, as well as chemicals such as sulfuric acid. Looking further ahead, the company aims to complete a technology review for all non-chemically modified materials by 2030. 

⁷Carbon Management Committee: A company-wide organization involving research, manufacturing, facilities, environment, and procurement to achieve net-zero emissions by 2050. The committee leads initiatives such as low-power equipment development, process gas reduction, and energy reduction based on AI/DT technology.

Figure 4. The five stages of developing recycling technology

To achieve these goals, the subcommittee has categorized the development of recycling technologies into five stages based on technological maturity. As shown in Figure 4, the subcommittee aims to reach stage 3 (material evaluation) for ten raw materials including neon by 2025.  

Ultimately, SK hynix plans to overcome the uncertain supply of materials which are largely imported from overseas, thereby elevating the company’s competitiveness for years to come.   

The post SK hynix Teams Up With Local Partners to Develop Pioneering Neon Gas Recycling Tech first appeared on SK hynix Newsroom.

• Aims to increase the percentage of recycled materials to 25% by 2025, above 30% by 2030
• Sets goals and action plans, while encouraging participation from partners
• Moves towards a circular economy by joining forces with all stakeholders

Seoul, February 6, 2024

SK hynix Inc. (or “the company”, www.skhynix.com) announced today that it has established a roadmap to actively utilize recycled¹ and renewable² materials in production, marking the first case that a semiconductor company lays out such mid- to long-term plan.

¹Recycled Materials: Materials extracted, recovered and reprocessed from pre-consumer waste generated in the manufacturing process before arrival at end users or from post-consumer waste disposed of after use.
²Renewable Materials: Sustainable materials that originate from nature and can be regenerated naturally over time, ultimately not depleted (e.g. wood, etc.).

“In order to achieve Net Zero, or Carbon Neutrality, establishing a circular economy system centered on resource recycling has become an important task for countries and companies around the world,” SK hynix said. “In line with this trend, we have decided to preemptively establish and faithfully implement the goal of increasing the use of recycled materials in stages.”

Through this roadmap, SK hynix aims to raise the proportion of recycled materials used in the products currently manufactured by the company to 25% by 2025 and more than 30% (based on weight) by 2030.

As part of the plan, SK hynix will start with essential metals for semiconductor production, such as copper, tin, and gold, and replace them with recycled materials. Industry experts point out that metal materials are the most effective when it comes to resource circulation as they account for a large proportion of the weight of finished memory products and are difficult to replace with other materials.

The company also plans to make all-out efforts to promote resource circularity, including replacing the plastic packaging used to protect finished semiconductor products with recycled plastic.

To this end, SK hynix prepared an implementation system for the goals in the roadmap.

The company will strengthen certification procedures and quality evaluation for recycled materials purchased directly by the company, and decide whether to apply the materials included in the parts supplied by business partners after receiving and reviewing the quality evaluation. In addition, SK hynix plans to encourage its suppliers to join the efforts to obtain validation from publicly trusted external organizations, such as ISO 14021³, to verify the use and proportion of recycled materials. In this process, the company will provide its unsparing support to its suppliers if necessary.

³ISO 14021: Type 2 environmental label established by the International Organization for Standardization (ISO) that manufacturers adopt to declare themselves environmentally friendly

“As a company that takes ESG management seriously, we intend to actively participate in the establishment of a global circular economy,” said Junho Song, Vice President and Head of Advanced Quality & Analysis, of SK hynix. “While implementing this roadmap, we will work together with all stakeholders in the semiconductor supply chain, including customers and suppliers, to achieve practical results.”

Disclaimer

These materials are not an offer for sale of the securities of SK hynix Inc. in the United States. The securities may not be offered or sold in the United States absent registration with the U.S. Securities and Exchange Commission or an exemption from registration under the U.S. Securities Act of 1933, as amended. SK hynix Inc. does not intend to register any offering in the United States or to conduct a public offering of securities in the United States.

About SK hynix Inc.

SK hynix Inc., headquartered in Korea, is the world’s top tier semiconductor supplier offering Dynamic Random Access Memory chips (“DRAM”), flash memory chips (“NAND flash”) and CMOS Image Sensors (“CIS”) for a wide range of distinguished customers globally. The Company’s shares are traded on the Korea Exchange, and the Global Depository shares are listed on the Luxembourg Stock Exchange. Further information about SK hynix is available at www.skhynix.com, news.skhynix.com.

Media Contact

SK hynix Inc.
Global Public Relations

Technical Leader
Sooyeon Lee
E-Mail: global_newsroom@skhynix.com

Technical Leader
Kanga Kong
E-Mail: global_newsroom@skhynix.com

The post SK hynix Unveils Roadmap for Use of Recycled Materials first appeared on SK hynix Newsroom.

SK hynix joins the global climate change response initiative alongside the global semiconductor industry. SK hynix announced on November 7th that it had recently joined the Semiconductor Climate Consortium (SCC), newly established by the Semiconductor Equipment and Materials International (SEMI)¹⁾, as a founding member.

¹⁾ Semiconductor Equipment and Materials International (SEMI) is an international industry association established in 1970 consisting of manufacturers in the global semiconductor equipment and materials industry. It responds to industrial policies and regulations, establishes industry standards, conducts market research and studies, and supports related industries by holding conferences and supporting educational projects.

The SCC is the first global consultative body formed to reduce greenhouse gas emissions throughout the semiconductor value chain, and major semiconductor companies leading in the material, component, equipment, and manufacturing fields–including SK hynix–and global ICT companies are participating as founding members.

SK hynix announced that it joined the SCC because of the need for a joint response to global climate change. To cooperate with the principles and goals set forth by the SCC, the company will collaborate closely on methodologies, technological innovation, and collective communication for reducing greenhouse gas emissions while reinforcing transparency in management through annual progress reports on its reduction of greenhouse gas emissions in Scope 1, 2, 3²⁾. SK hynix will also set long- and short-term goals for greenhouse gas reduction with the goal of achieving Net Zero³⁾ by 2050.

²⁾ Greenhouse Gas Scope 1, 2, 3: Greenhouse Gas Scope 1 refers to greenhouse gases (direct emissions) generated during product production. Scope 2 refers to greenhouse gases (indirect emissions) generated in the process of making electricity or steam used at worksites, and Scope 3 refers to greenhouse gases (other indirect emissions) emitted along the corporate value chain. In addition to direct product production, such emissions happen during raw material purchases, carrying out of logistics, and product use and disposal.
³⁾ Net Zero: Zero net emissions of the six major greenhouse gases, including carbon dioxide.

Ajit Manocha, President and CEO at SEMI, said, “I applaud SK hynix for its commitment to becoming a founding member of the Semiconductor Climate Consortium (SCC) and for its continued support of global sustainability efforts. To achieve Net Zero globally, we need to pool industry resources to solve the complex challenges of decarbonization. We expect SCC members to create the best solution through cooperation within the semiconductor value chain.”

Bangsil Lee, Head of ESG Strategy at SK hynix, said, “Collaboration between like-minded partners is essential for success in climate action. I believe that through the SCC, we can expedite our journey towards decarbonization and amplify the impacts of our concerted efforts to reduce greenhouse gas emissions. SK hynix will collaborate with all of our stakeholders throughout the entire value chain to establish a sustainable semiconductor ecosystem.”

The post SK hynix Becomes Founding Member of SCC, Joining Semiconductor Industry’s Efforts to Combat Climate Change first appeared on SK hynix Newsroom.